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8975 Lawrence Welk Dr Spc 288 is near Jesmond Dene Park, Daley Ranch and Rod Mc Leod Park.A high purity Ru powder wherein the content of the respective alkali metal elements such as Na and K is 10 wtppm or less, and the content of Al is in the range of 1 to 50 wtppm.Further, disclosed is a high purity ruthenium sputtering target wherein the content of respective alkali metal elements is 0.1 wtppm or less, the content of respective alkali earth metal elements is 0.1 wtppm or less, the content of respective transition metal elements excluding platinum group elements is 0.1 wtppm or less, the content of respective radioactive isotopes is 1 wtppb or less, the content of gas component elements is 30 wtppm or less in total, and having a purity of 99.995wt % (for instance, refer to Patent Document 5).Moreover, disclosed is a high purity ruthenium powder wherein the content of respective alkali metals, alkali earth metals, aluminum, iron, nickel, and copper is 0.1 ppm or less (for instance, refer to Patent Document 6).This 1,488 square foot home sits on a 128.75 acre lot and features 2 bedrooms and 2 bathrooms.This property was built in 1983 and last sold on October 18, 2017 for 5,000. Nearby restaurants include Canyon Grille, Pizza Hut Express and 9th Hole Snack Shop.Thus, an object of the present invention is to provide a high purity Ru powder for manufacturing a sputtering target which is capable of reducing harmful substances as much as possible, generates few particles during deposition, has a uniform film thickness distribution, has a purity of 4N (99.99%) or higher, and is suitable in forming a capacitor electrode material of a semiconductor memory; a sputtering target obtained by sintering such high purity Ru powder; a thin film obtained by sputtering said target; and a manufacturing method of the foregoing high purity Ru powder.The present invention provides 1) a high purity Ru powder wherein the content of the respective alkali metal elements such as Na and K is 10 wtppm or less, and the content of Al is in the range of 1 to 50 wtppm; 2) a high purity Ru powder wherein the content of Al is in the range of 5 to 20 wtppm; 3) the high purity Ru powder according to 1) or 2) above, wherein the total content of transition metal elements such as Fe, Ni, Co, Cr and Cu is 100 wtppm or less, and the content of the respective radioactive elements such as U and Th is 10 wtppb or less; 4) the high purity Ru powder according to any one of 1) to 3) above, wherein the purity excluding gas components such as oxygen, nitrogen and hydrogen is 99.99% or higher; 5) the high purity Ru powder according to 4) above, wherein the content of oxygen is 100 wtppm or less; 6) a sputtering target obtained by sintering the high purity Ru powder according to any one of 1) to 5) above and a thin film obtained by sputtering said target; and 7) a manufacturing method of the high purity Ru powder according to any one of 1) to 5) above, wherein Ru raw material having a purity of 3N (99.9%) or less is used as an anode and electrolytic refining is performed in a solution.

It is thereby possible to obtain a thin film having extremely superior characteristics and which is useful as an electrode material for a dielectric thin film memory.The present invention pertains to a high purity Ru powder for manufacturing a sputtering target having a purity of 4N (99.99%) or higher and which is suitable in forming a capacitor electrode material of a semiconductor memory, a sputtering target obtained by sintering such high purity Ru powder, a thin film obtained by sputtering said target, and a manufacturing method of the foregoing high purity Ru powder.Today, the use of Ru as an electrode material or the like of a semiconductor capacitor is rapidly expanding.All new kitchen cabinets, granite countertops and brand new appliances. Community offers clubhouse, pool, spa, BBQ area, tennis courts, and golf.Both bathrooms are remodeled with new cabinets, and granite counter tops. * You OWN THE LAND your home is built on * 8975 Lawrence Welk Dr Spc 288 is a home in Escondido, CA 92026.




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